Location
2236 EECS
Biography
Additional Titles
- George I. Haddad Professor of Electrical Engineering and Computer Science
- William P. Allis Distinguished University Professor of Electrical Engineering and Computer Science
- Professor, Electrical Engineering and Computer Science
- Professor, Chemical Engineering
- Professor, Applied Physics
- Director and Founder, Michigan Institute for Plasma Science and Engineering
- Director and Founder, DOE Center on Control of Plasma Kinetics
News
Education
California Institute of Technology
PhD Applied Physics ’79
MS Applied Physics, ’77
University of California at Los Angeles
BS Nuclear Engineering (Summa Cum Laude) ’76
BA Astronomy (Summa Cum Laude) ’76
Research Interests
Low Temperature Plasmas, Laser Physics and Spectroscopy, Plasma Chemistry, Plasma and Photochemical Materials Processing, Amorphous Thin Films, Pulse Power Plasmas, Environmental and Medical Applications of Plasmas
RESEARCH AREAS
Applied electromagnetics, MEMS and microsystems, optics and photonics, quantum science and engineering, integrated circuit design and VLSI, plasma science and engineering, energy and power.
AREAS OF SPECIALITY
Computational electromagnetics, microfluidics and gas/chemical, MEMS technology and packaging, optoelectronics, plasma fabrication and plasma-based MEMS devices, plasma materials processing of microelectronics, plasma science and engineering; solid-state energy conversion technologies.
Plasmas & Nuclear Fusion
Professional Service
University of Michigan
Ann Arbor, Michigan
2008-present
- George I Haddad Collegiate Professor, Electrical Engineering & Computer Science Dept.
- Professor, Nuclear Engineering and Radiological Sciences Dept.
- Professor, Applied Physics Program
- Professor, Chemical Engineering
- Director, Michigan Institute for Plasma Science and Engineering
- Director, DOE Center on Control of Plasma Kinetics
Iowa State University
Ames, Iowa
2005-2008
- Dean, College of Engineering
- Melsa Professor of Engineering, Department of Electrical and Computer Engineering
University of Illinois at Urbana-Champaign
- 2005-present Adjunct Faculty, Department of Electrical and Computer Engineering
- 1999-2004 Founder Professor of Engineering
- 1991-2004 Professor, Department of Electrical and Computer Engineering
- 2002-2004 Interim Head of Chemical and Biomolecular Engineering
- 2001 Interim Head of Electrical and Computer Engineering
- 2000 Interim Associate Dean of Administrative Affairs, College of Engineering
- 1994-1995 Assistant Dean of Academic Programs, College of Engineering
- 1988-1991 Associate Professor, Electrical and Computer Engineering
- 1986-1988 Assistant Professor, Electrical and Computer Engineering
Honors and Awards
- Charles K. Birdsall Award, Inst. Electrical and Electronic Engineers (IEEE), 2015
- National Academy of Engineering, 2011
- Will Allis Prize for the Study of Ionized Gases, 2010
American Physical Society - Medard Welch Award, 2010
American Vacuum Society - Alumni Academic Achievement Award, 2009
UCLA College of Engineering - University Researcher Award, 2008
Semiconductor Industry Association - SRC Student Symposium, Best-in-Session Award; 2005, 2006
- AVS Distinguished Lecturer 2001-2003
- IEEE Plasma Science and Applications Award, 2000
- Institute of Electrical and Electronics Engineers